1 PCS MKS Type 153 Butterfly Valve Controller #LYQ007
1 PCS MKS Type 153 Butterfly Valve Controller #LYQ007
| Parameter | Value |
|---|---|
| Product Type | Intelligent Exhaust Throttle (Butterfly) Valve Controller |
| Model Number | 153D-2-50-2 |
| Nominal Bore | 2 inches (51 mm) |
| Flange Connection | NW50 ISO-KF |
| Control Modes | Swing Positioning Mode, Pressure Control Mode |
| Body Material | 316 Stainless Steel |
| Seal Type | All-Metal Seals |
| Leak Rate | < 1 × 10⁻¹⁰ atm·cc/sec (He) |
| Ambient Temp Range | 0 °C to 70 °C |
| Valve Body Temp | Up to 90 °C |
| Drive System | Mechanical Drive with Integrated Cosine Generator (Linearized Transfer Characteristic) |
| Control Electronics | On-Board Microprocessor, Digital Control AlgorithmMKS |
| Communication | RS-232 InterfaceMKS |
| Setpoint Input | External Analog Voltage, RS-232 CommandMKS |
| Manual Control | MAN Switch (Open/Close) with LED Indicators |
| Application | Semiconductor Processing, High Vacuum Systems |
| Features | Compact Integrated Design (No Separate Controller Required)MKS |
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