1 PCS used HORIBA STEC SEF-51 Mass Flow Meter #LYQ007
1 PCS used HORIBA STEC SEF-51 Mass Flow Meter #LYQ007
| Parameter | Specifications |
|---|---|
| Model | SEF-51 (Mass Flow Meter) |
| Flow Measurement Range | 0~100% F.S.HORIBA |
| Rated Flow Options | 10, 20, 30, 50, 100, 200, 300, 500 SCCM; 1, 2, 3, 5 SLM (N2 equivalent)HORIBA |
| Accuracy | ±1% F.S.HORIBA |
| Linearity | ±0.5% F.S.HORIBA |
| Repeatability | ±0.2% F.S.HORIBA |
| Response Time | ≤6 sec (T98)HORIBA |
| Operating Temperature | +5°C to +40°C |
| Operating Pressure | -0.05 MPa to 1 MPa (G) |
| Proof Pressure | 1.5 MPa |
| Leak Integrity | ≤1 × 10⁻⁸ Pa·m³/s (He) |
| Wetted Parts Material | SUS316, VitonHORIBA |
| Display | 3-digit LCD (instant flow), 4-digit (total flow) |
| Display Update Cycle | Every 0.6 seconds |
| Flow Output Signal | 0~5 VDC (Min. load resistance: 2 kΩ) |
| Alarm Output | Upper/Lower limit (1 each), Open collector, Max rating: 30V 50mA |
| Power Supply | +15 VDC ±5%, 60 mA; -15 VDC ±5%, 150 mA |
| Power Consumption | 3.15 VA |
| Standard Fitting | 1/4 inch Swagelok type |
| Mounting Orientation | FreeHORIBA |
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