1 PCS used Lam Research 853-284912-408 RF Power Matcher #LYQ007
1 PCS used Lam Research 853-284912-408 RF Power Matcher #LYQ007
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Parameter
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Specification
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Unit
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Official Notes
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Product Name
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RF Power Matcher
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-
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Original Lam Research factory product, specialized for RF power impedance matching in semiconductor equipment
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Model Number
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853-284912-408
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-
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Unique model code for Lam Research RF power matcher series, consistent with factory calibration standards
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Brand & Manufacturer
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Lam Research Corporation
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-
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Complies with Lam Research strict semiconductor equipment component standards, ensuring stable impedance matching performance
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Parameter
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Minimum
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Typical
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Maximum
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Unit
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Official Notes
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Operating Frequency Range
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13.56
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13.56
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13.56
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MHz
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Fixed operating frequency, optimized for 13.56 MHz RF power systems in semiconductor manufacturing
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Input Power Range
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100
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500
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1000
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W
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Wide input power adaptability, compatible with different RF power supply outputs in semiconductor equipment
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Impedance Matching Range
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10
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50
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100
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Ω
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High-precision impedance matching, can match load impedance to 50Ω standard RF output impedance
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Matching Accuracy
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-
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±0.5
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±1.0
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Ω
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High matching precision, ensuring stable RF power transmission and reducing power loss
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Matching Speed
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10
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20
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50
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ms
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Fast matching response, real-time adaptation to load impedance changes during plasma processing
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Insertion Loss
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-
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0.1
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0.3
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dB
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Low insertion loss, ensuring efficient RF power transmission from power supply to load
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VSWR (Voltage Standing Wave Ratio)
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-
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1.05:1
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1.10:1
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-
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Low VSWR, reducing RF signal reflection and protecting RF power supply components
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Parameter
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Minimum
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Typical
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Maximum
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Unit
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Official Notes
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Control Voltage (DC)
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12
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24
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30
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VDC
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Stable DC control power supply, adaptable to semiconductor equipment control system power environment
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Control Current
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0.1
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0.2
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0.3
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A
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Low control current, low power consumption, compatible with equipment control circuit
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Power Consumption
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5
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10
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15
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W
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Energy-saving design, low power consumption during long-term continuous operation in semiconductor production
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