1 PCS used AMAT Vacuum Chamber Controller ESW0090-09508V01 REV 01#LYQ007
1 PCS used AMAT Vacuum Chamber Controller ESW0090-09508V01 REV 01#LYQ007
| Parameter | Value |
|---|---|
| Part Number | ESW0090-09508V01 |
| Revision | 01 |
| Product Type | Vacuum Chamber Control Module (PCB Assembly) |
| Input Voltage | 24 VDC ±10% |
| Power Consumption | Max. 8.5 W |
| Processor | High-performance embedded controller |
| Memory | 16 MB SDRAM, 32 MB Flash |
| Communication Interface | RS-485 (Industrial Bus) |
| I/O Configuration | Multi-channel analog & digital I/O for vacuum sensors, valves, and interlocks |
| Control Function | Precision vacuum pressure regulation, chamber state monitoring, safety interlock control |
| Operating Temperature | 0°C to +60°C (32°F to 140°F) |
| Storage Temperature | -40°C to +85°C |
| Dimensions (L×W×H) | 147 mm × 51.5 mm × 114 mm |
| Weight | 0.6 kg |
| Board Material | FR-4 Glass Epoxy |
| Surface Finish | ENIG (Electroless Nickel Immersion Gold) |
| Protection Features | Over-voltage, over-current, over-temperature protection |
| Compliance | Industrial EMI/EMC standards |
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