1 PCS used VAT Vacuum Gate Valve 10846-XE28-AAX2/0919 #LYQ007
1 PCS used VAT Vacuum Gate Valve 10846-XE28-AAX2/0919 #LYQ007
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Parameter
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Specification
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Unit
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Notes
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Product Name
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Vacuum Gate Valve
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-
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Genuine VAT Factory Part
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Model No.
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10846-XE28-AAX2/0919
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-
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Original Factory Revision
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Brand
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VAT
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-
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Original Design & Production
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Product Series
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Series 10.8
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-
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UHV Ultra High Vacuum
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Application
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Semiconductor Equipment
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-
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High Precision Vacuum Control
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Vacuum Level
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1e-10
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1e-8
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1e-6
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mbar
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UHV Working Range
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Leak Rate
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≤1e-12
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1e-11
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≤1e-10
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mbar·l/s
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He Leak Tested
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Conductance
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120
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130
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140
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l/s
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Air at 20℃
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Valve Port Size
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28
|
28
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28
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mm
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Nominal Port Diameter
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|
Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Operating Stroke
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8
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10
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12
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mm
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Smooth Gate Movement
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Opening/Closing Time
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0.3
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0.5
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0.7
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s
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At Rated Voltage
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Seal Material
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Viton/FKM
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-
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-
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High Temperature Resistant
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|
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Body Material
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Stainless Steel 316L
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-
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-
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Corrosion Resistant
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