1 PCS USED HORIBA EV-140C-P Etch Endpoint Monitor #LYQ007
1 PCS USED HORIBA EV-140C-P Etch Endpoint Monitor #LYQ007
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Parameter
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Specification
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Unit
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Notes
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Product Name
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Etch Endpoint Monitor
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-
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Genuine HORIBA Factory Part, 100% Authentic
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Product Model
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EV-140C-P
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-
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HORIBA Standard Model, Factory Calibrated
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Brand
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HORIBA, Ltd.
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-
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Original HORIBA Design & Production
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Product Type
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Optical Emission Spectroscopy
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-
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Emission Analysis Type Endpoint Monitor
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Origin
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HORIBA Official Production Line
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-
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Complies with HORIBA Factory Standards
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Application
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Semiconductor Thin-Film Process
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-
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Plasma Endpoint Detection, Plasma Control
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Division
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Dry Process Control
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-
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Semiconductor Industry Application
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Wavelength Range
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200
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-
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800
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nm
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UV to Visible Spectrum
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Optical Resolution
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≤2.0
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-
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≤2.5
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nm
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FWHM, 200-500nm/500-700nm
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Optical System
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-
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Concave Grating
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-
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-
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70mm Diameter, F/2 Opening Ratio
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Detector Type
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-
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Back-Illuminated CCD
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-
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-
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2048 Channels, High Sensitivity
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A/D Resolution
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-
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16
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-
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bit
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High Precision Signal Conversion
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Exposure Time
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20
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-
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2500
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ms
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Adjustable, 20ms~2.5s
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Optical Fiber
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-
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Quartz Fiber
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-
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-
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7pcs, 230μm Core, 690μm Effective Dia
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Parameter
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Specification
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Unit
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Notes
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Interface Type
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Digital, Analog, Ethernet
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-
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Fast Spectrum Data Transfer
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Remote Communication
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Parallel I/O, RS232C
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-
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Remote Control of Equipment
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Signal Output
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2ch Analog 0-5VDC, Parallel I/O
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-
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Real-Time Signal Output
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Software
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Sigma-P Software
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-
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Advanced Process Control & Analysis
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Algorithm
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Rapture Intensity Algorithm
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-
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Accurate Faint Signal Detection
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