1 PCS used VAT Vacuum Valve 02112-BA24-ATG1/0066 #LYQ007
1 PCS used VAT Vacuum Valve 02112-BA24-ATG1/0066 #LYQ007
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Parameter
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Specification
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Unit
|
Notes
|
|
Product Name
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Vacuum Valve
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-
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Genuine VAT, Original Factory Production
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Model No.
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02112-BA24-ATG1/0066
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-
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02112 Series, Factory Original Revision
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Brand
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VAT (VAT Valves)
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-
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Original Design & High Precision Standard
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Product Series
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02112
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-
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Wafer Vacuum Transfer Isolation Valve
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Application
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Vacuum Isolation & Transfer
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-
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Semiconductor 200/300/450mm Wafer Process[1]
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|
Parameter
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Min
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Typ
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Max
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Unit
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Notes
|
|
Operating Vacuum
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1e-9
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1e-6
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1013
|
mbar
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Full Vacuum Range Adaptable
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|
Leak Rate
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-
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≤1e-9
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-
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mbar·l/s
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He Leak Test, Factory Calibrated
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Response Time
|
-
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<0.5
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-
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sec
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Open/Close Full Response
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|
Valve Orifice Size
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66
|
66
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66
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mm
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Matching Model Suffix /0066
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Operating Cycle
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1e6
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1.2e6
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-
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Cycles
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Long-Term Stable Operation
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|
Parameter
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Min
|
Typ
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Max
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Unit
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Notes
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|
Supply Voltage
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24
|
24
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24
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VDC
|
Stable DC Power Input
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Operating Current
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0.3
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0.5
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0.7
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A
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At 24VDC Rated Voltage
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Control Signal
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Digital I/O
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-
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-
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Open/Close Control, Status Feedback
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