1 PCS used Entegris NT Integrated Flow Controller 6510-T2-F02-XXX-M-P1-U3-N09 #LYQ007
1 PCS used Entegris NT Integrated Flow Controller 6510-T2-F02-XXX-M-P1-U3-N09 #LYQ007
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Parameter
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Specification
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Unit
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Notes
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Brand
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Entegris (Intelgris)
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-
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Genuine, Original Entegris Factory Production, 100% Authentic, NT Series Integrated Flow Controller[1]
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Product Model
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6510-T2-F02-XXX-M-P1-U3-N09
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Original Entegris Model, Factory Calibrated, No Modification, Directly Compatible with Entegris Control Systems
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Product Name
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Entegris NT Integrated Flow Controller
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Industrial Grade, High Precision, Integrated Design, Customized for Fluid Flow Control Scenarios[2]
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Port Size
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1/4"
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-
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Standard 1/4 inch port, Compatible with Common Industrial Fluid Pipes, Factory Standard Size[3]
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Application
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Semiconductor Production, Precision Electronics Manufacturing, Chemical Fluid Control, Vacuum Processing, Lab Research
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-
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Adapt to Entegris Full-Automatic Production Lines, Ensure Stable and Precise Fluid Flow Control[4]
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Origin
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Entegris Original Factory (USA)
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Strict Factory Quality Control, Meet Entegris Global Flow Control Standards and Technical Requirements
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Flow Control Range (Air, 25℃, 1atm)
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0.1
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5.0
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10.0
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SLM
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Standard Flow Range, Calibrated by Entegris Factory, High Consistency[5]
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Flow Control Accuracy
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±0.5
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±0.2
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-
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% of FS
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High Precision Control, Meet Precision Fluid Flow Requirements[6]
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Repeatability
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±0.1
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±0.05
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-
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% of FS
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Excellent Repeatability, Ensure Stable Flow Control in Long-term Operation
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Response Time
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10
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20
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30
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ms
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Fast Response, Real-time Adjustment to Flow Changes[7]
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Operating Pressure Range
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0.1
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1.0
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1.6
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MPa
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Wide Pressure Adaptation, Compatible with Low and Medium Pressure Scenarios[8]
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Operating Voltage (DC)
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18
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24
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28
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VDC
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Stable Power Supply, Entegris Standard Flow Control Voltage[9]
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Rated Current
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0.1
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0.3
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0.5
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A
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Rated Working Condition, Factory Calibrated for Flow Control Scenarios[10]
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Power Consumption
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2
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5
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8
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Watts
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Low Power Consumption, Energy Saving for Continuous Flow Control
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Control Signal Input
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Analog Signal (0-5V, 0-10V), Digital Signal (RS485, Modbus)
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-
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Multi-signal Compatible, Easy Integration with Automation Control Systems[11]
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Output Signal
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4-20mA Current Signal, 0-10V Voltage Signal
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-
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Standard Output, Convenient for Flow Monitoring and Data Feedback
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