1 PCS used NANOTECH (NANOTEK) NEFL-309SF 10nm UV Etching Progress Detector #LYQ007
1 PCS used NANOTECH (NANOTEK) NEFL-309SF 10nm UV Etching Progress Detector #LYQ007
| Parameter | Details |
|---|---|
| Model | NEFL-309SF |
| Type | Filter Type End Point Detector (EPD) |
| Application | In-Situ Process Monitor for Etching, CVD, Asher |
| Resolution | 10 nm |
| Sensor | PMT or Enhanced Detector |
| Light Transmission | Direct contact on chamber window |
| Input Voltage | ±15 VDC |
| Output Signal | 0–10 VDC Analog, Adjustable Gain/Offset |
| Operating Temperature | -10 °C ~ +60 °C |
| Dimensions | 95 (W) × 55.7 (H) × 55 (D) mm |
| Weight | Approx. 0.3 ~ 0.8 kg |
| Construction | Filter / Sensor / Board / Direct Contact |
| Mounting | Equipment Rack Mountable |
| Manufacturer | NANOTEK (Korea) |
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