1 PCS used AMAT 0190-22670 Vacuum Angle Valve #LYQ007
Parameter
Value
Actuation Type
Pneumatic (Single-acting, normally closed)
Connection Type
KF-25 (NW-25) vacuum flange
Body Material
316L Stainless Steel (SUS316L)
Bellows Material
316L Stainless Steel
Seal Material
Viton (FKM)
Country of Origin
USA
Weight
Approx. 5 lbs (2.27 kg)
Overall Dimensions
69.6 mm (OD) x 173.6 mm (Length)
Parameter
Value
Vacuum Range
Atmosphere to 1×10⁻⁹ Torr
Leak Rate
< 1×10⁻⁹ std cc/sec He (internal)
Pneumatic Pressure
5.8–6.5 bar (85–95 psi)
Max Bake Temperature
120 °C (Valve body)
Cycle Life
> 1,000,000 cycles
Operating Temperature
-40 °C to +120 °C
Item
Description
AMAT P/N
0190-22670
OEM P/N
Nor-Cal (Pfeiffer) equivalent
Application
Applied Materials semiconductor vacuum systems
Function
Isolation & control of high vacuum gas flow
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