1 PCS used COMET RF Match (AMAT P/N 0190-53692)
1 PCS used COMET RF Match (AMAT P/N 0190-53692)
| Parameter | Value |
|---|---|
| Manufacturer | COMET |
| AMAT Part Number | 0190-53692 |
| COMET Model | 20034090 (Typical) |
| Frequency Range | 13.56 MHz (Fixed) |
| Max RF Power Input | 5,000 W (5 kW) |
| Max RF Voltage (VRMS) | 5,000 VRMS |
| System Impedance | 50 Ω (Standard) |
| Control Voltage | 24 VDC |
| Control Current | 3.5 A (Max) |
| VSWR (Typical) | ≤ 1.3:1 |
| Adjustment Type | Automatic (Auto-Tuning) |
| Weight | 7.1 kg (15.7 lbs) |
| Cooling | Forced Air (Internal Fans) |
| Application | Semiconductor Etch / PVD / CVD Chambers |
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