1 PCS used AE Paramount 3013 (3156330-015) RF Generator #LYQ007
1 PCS used AE Paramount 3013 (3156330-015) RF Generator #LYQ007
| Parameter | Value |
|---|---|
| Manufacturer | Advanced Energy (AE) |
| Model Number | Paramount 3013 |
| Part Number (M/N) | 3156330-015 |
| Output Power | 3000 Watts (3kW) |
| Output Frequency | 13.56 MHz |
| Frequency Type | Fixed / Variable |
| Input Voltage | 208/400/480 VAC, 3-phase |
| Cooling Method | Hybrid (Air + Water) |
| Dimensions (H x W x D) | 5.25" x 8.5" x 15" (133.4 x 215.9 x 381 mm) |
| Weight | Approx. 15 kg (33 lbs) |
| Control Interface | Digital, CEX (Common Exciter), Analog User Port (25-pin) |
| Communication | RS-232, Ethernet |
| Applications | Semiconductor Etch, PECVD, HDP-CVD, PVD, PEALD |
| Impedance | 50 Ohms (Standard) |
| Efficiency | >68% @ 3kW into 50 Ohms |
| Regulatory | CE Marked |
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