1 PCS used LAM RESEARCH 853-800087-405 RF Match #LYQ007
1 PCS used LAM RESEARCH 853-800087-405 RF Match #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 853-800087-405 |
| Manufacturer | LAM RESEARCH |
| Type | RF Impedance Match Network |
| Frequency Range | 13.56 MHz (Typical) |
| Power Rating | Up to 5 kW CW |
| Input Impedance | 50 Ω |
| Control Interface | Analog / Digital (Auto-Tuning) |
| Cooling | Air-Cooled |
| Communication | RS-232 / Analog I/O |
| Operating Voltage | 200–240 V AC, 1φ, 50/60 Hz |
| Dimensions (W×D×H) | Approx. 430 × 350 × 220 mm |
| Weight | Approx. 22 kg |
| Application | Semiconductor Etch / Deposition |
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world.
3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please contact us to provide you with accurate quotation and real pictures.
4. If you can not find the product you need in our store, please contact us .we will check it for you.