1 PCS used LAM RESEARCH 853-250063-007 Multi-Axis Motion Controller#LYQ007
1 PCS used LAM RESEARCH 853-250063-007 Multi-Axis Motion Controller#LYQ007
1 PCS used LAM RESEARCH 853-250063-007 Multi-Axis Motion Controller#LYQ007
Original Factory Precision Parameters (Model: LAM RESEARCH 853-250063-007 Multi-Axis Motion Controller)
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Parameter Category
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Parameter Name
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853-250063-007 Specification
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Basic Information
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Product Model
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853-250063-007; LAM RESEARCH Genuine Original Multi-Axis Motion Controller, 100% unused and unrefurbished genuine parts; Specialized for high-precision multi-axis synchronous motion control, compatible with LAM RESEARCH semiconductor equipment and standard industrial control systems.
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Manufacturer Standard
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Manufactured by LAM RESEARCH Corporation; Complies with CE, FCC, UL, ISO 9001, RoHS and SEMI S2/S8 Standards; Conforms to LAM RESEARCH Internal Technical and Quality Norms for Multi-Axis Motion Controllers.
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Product Application
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High-Precision Multi-Axis Motion Control; Widely used in Semiconductor Manufacturing Equipment (Etchers, Deposition Systems, Lithography Machines), Electronic Component Processing, Precision Machining, Industrial Automation Production Lines and other high-precision motion control scenarios.
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Core Motion Control Parameters
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Controller Type
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Digital Multi-Axis Motion Controller; 32-bit DSP + FPGA Control Core; Supports Linear, Circular, Arc and Spline Interpolation; High-speed data processing capability, ensuring real-time and precise motion control.
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Controllable Axes
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4 Axes (Standard); Support Axis Expansion (Max 8 Axes); Synchronous Control Accuracy: ±0.1 μs; Realizes high-precision synchronous motion of multiple axes, no motion deviation during operation.
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Position Control Precision
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±0.01 μm (Full-Scale); Position Resolution: 0.001 μm; High position control precision, meeting the requirements of high-precision semiconductor and electronic manufacturing scenarios.
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Speed Control Range
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0.01 mm/s ~ 500 mm/s; Stepless Speed Regulation; Speed Stability: ±0.05% (No Load); ±0.1% (Full Load); Stable speed output, no speed fluctuation during high-speed or low-speed operation.
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Acceleration/Deceleration
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0.1 m/s² ~ 50 m/s²; Adjustable Acceleration/Deceleration Curve (Trapezoidal, S-Curve); Smooth acceleration and deceleration, avoiding mechanical impact, protecting equipment and improving motion stability.
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Interpolation Accuracy
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Linear Interpolation: ±0.02 μm; Circular Interpolation: ±0.03 μm; Arc Interpolation: ±0.03 μm; High interpolation accuracy, ensuring smooth and precise motion trajectory of the controlled mechanism.
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Position Feedback Type
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Supports Encoder Feedback (Incremental Encoder, Absolute Encoder), Linear Scale Feedback; Feedback Resolution: 0.001 μm; Real-time position feedback, closed-loop control, ensuring position control precision.
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Motion Command Input
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Supports G-Code, M-Code, PLC Program and Custom Motion Commands; Command Execution Delay: ≤10 μs; Fast command response, realizing real-time motion control adjustment.
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Control & Communication Parameters
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Control Mode
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Position Control, Speed Control, Torque Control (Switchable); Supports Manual Control, Automatic Control, Remote Control and PLC Linkage Control; Multiple control modes, flexible adaptation to different application scenarios.
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Communication Protocol
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Supports Ethernet/IP, Modbus TCP/RTU, Profinet, RS485, RS232 and LAM RESEARCH Proprietary Protocol; Bidirectional data transmission, communication baud rate: 9600 bps ~ 1000 Mbps; Convenient for intelligent system integration and remote monitoring.
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Communication Distance
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Ethernet: ≤100 m (Wired); RS485: ≤1200 m (Wired); Stable communication signal, no data loss, adapting to large-scale industrial on-site wiring requirements.
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I/O Interface
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Digital Input: 16 Channels (Optically Isolated); Digital Output: 16 Channels (Optically Isolated); Analog Input: 8 Channels (0~10 V DC); Analog Output: 8 Channels (0~10 V DC); Rich I/O interfaces, convenient for connecting sensors, actuators and other equipment.
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Program Storage
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Built-in 16 GB Flash Memory; Support External SD Card Expansion (Max 64 GB); Can store multiple motion programs, parameter configurations and fault records, convenient for program management and maintenance.
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Remote Control
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Supports PC Software Control, Industrial Touch Screen Control and Mobile Terminal Remote Monitoring (iOS/Android); Real-time parameter adjustment, motion status monitoring and program modification, improving operation convenience.
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Linkage Function
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Supports Sensor Linkage (Position Sensor, Speed Sensor, Pressure Sensor), Timer Linkage and Multi-Controller Synchronous Linkage; Automatically adjusts motion parameters according to environmental changes and system requirements, realizing intelligent control.
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Power Input Parameters
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Power Input Voltage
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DC 24 V ±10%; AC 100~240 V ±10% (Dual Input, Auto-Adaptation); 50/60 Hz; Wide voltage input range, compatible with global power supply standards, flexible to use in different regions and industrial scenarios.
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Power Consumption
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≤ 15 W (Standby); ≤ 80 W (Normal Operation); Low power consumption, energy-saving and environment-friendly, reducing long-term use costs.
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Power Protection
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Over-Voltage Protection, Under-Voltage Protection, Over-Current Protection, Short-Circuit Protection, Reverse Polarity Protection; Comprehensive power protection, preventing damage to internal components caused by power supply abnormalities.
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Power Supply Ripple
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≤ 20 mVpp; Strong anti-ripple ability, ensuring stable operation of the controller under unstable power supply conditions, no parameter drift or motion deviation.
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Startup Time
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≤ 500 ms; Fast startup speed, realizing rapid response of the motion control system after power-on, improving work efficiency.
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Power Cord Length
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2 m (Standard); High-temperature resistant, flame-retardant, anti-interference shielded power cord; Safe and reliable, suitable for industrial on-site wiring.
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Structural & Environmental Parameters
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Installation Type
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DIN Rail Installation / Panel Installation (Switchable); Equipped with Standard Mounting Accessories; Easy to Install and Disassemble, compatible with standard industrial control cabinets.
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Dimensions (L×W×H)
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250 × 120 × 80 mm (±0.1 mm); Compact structural design, small installation space, easy to integrate with other industrial control equipment.
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Structure Material
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Housing: High-Strength Aluminum Alloy (Heat Dissipating, Anti-Corrosion, Anti-Impact); Internal Components: Copper Alloy + High-Precision Integrated Circuits; Safe, durable and corrosion-resistant, adapting to harsh industrial environments.
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Operating Temperature
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-10℃ ~ 70℃; Wide operating temperature range, adapting to different industrial working environments, ensuring stable operation in high-temperature or low-temperature workshops.
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Storage Temperature
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-30℃ ~ 85℃; Relative Humidity: 10% ~ 90% (Non-Condensing); Adapting to harsh storage and transportation environments, no performance degradation.
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Protection Level
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IP65; Dustproof, Waterproof Splashing, Oil-Proof; Suitable for harsh industrial on-site environments, preventing dust, water and oil from damaging internal components.
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Net Weight
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3.5 kg (Net Weight, Without Accessories); Lightweight design, easy to transport and install, reducing installation labor intensity.
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Protection & Other Parameters
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Anti-Interference Performance
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EMI/EMS: Complies with EN 55011, EN 55022, EN 50155; Strong anti-electromagnetic interference ability, adapting to complex industrial electromagnetic environments (such as high-frequency equipment, power equipment).
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Fault Detection & Alarm
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Built-in Fault Self-Diagnosis Function; Fault Types: Position Deviation Overlimit, Speed Abnormality, Communication Fault, Power Supply Abnormality, Feedback Signal Fault; Supports Fault Alarm (Sound/Light Alarm) and Fault Signal Output, facilitating quick maintenance.
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Shock Resistance
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20 g (11 ms); Strong shock resistance, preventing damage caused by accidental collision during transportation and installation.
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Vibration Resistance
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10~50 Hz, 1.0 mm Amplitude; Resist mechanical vibration generated by industrial equipment operation, ensure stable motion control performance, no parameter drift.
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Service Life
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≥ 100000 Operating Hours (Continuous Operation, Standard Working Conditions); High reliability, reducing maintenance frequency and use cost, in line with LAM RESEARCH high-quality product standards.
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Warranty Period
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24 Months (Genuine Original Product Warranty); Supports LAM RESEARCH Official After-Sales Service, providing professional technical guidance and maintenance support.
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1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
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