1 PCS used Lam Research 853-252747-006 Semiconductor Controller #LYQ007
Parameter
Value
Part Number
853-252747-006
Manufacturer
Lam Research Corporation
Product Type
Semiconductor Equipment Controller Module
Suitable Equipment
Lam Research plasma etching or deposition systems
Parameter
Value
Input Voltage
24 VDC (Typical)
Communication Interface
Ethernet, RS-485 / SECS/GEM compatible
I/O Configuration
Multi-channel digital & analog I/O
Control Precision
≤ ±0.01% (for motion/process control)
Response Time
≤ 5 ms
Parameter
Value
Operating Temperature
0°C to +50°C
Humidity
10% – 90% RH, non-condensing
Cleanroom Rating
Class 1000 (ISO 6) or better
MTBF
> 50,000 hours
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