1 PCS used MKS ENI SPECTRUM B-5002-02 RF Power Supply#LYQ007
1 PCS used MKS ENI SPECTRUM B-5002-02 RF Power Supply#LYQ007
| Parameter | Details |
|---|---|
| Model | B-5002-02 |
| Part Number (P/N) | 0190-15320 |
| Frequency Range | 1.8 – 2.17 MHz |
| Center Frequency | 2.00 MHz |
| Output Power | 5000 W (5 kW) Nominal |
| Dynamic Power Range | 50 – 5000 W |
| Input Power | 3-phase, 200-208 VAC, 30 A, 50/60 Hz |
| Load Regulation (Forward Power) | 5000 W @ 1.1:1 VSWR |
| 4278 W @ 1.5:1 VSWR | |
| 3465 W @ 2.0:1 VSWR | |
| 2738 W @ 3.0:1 VSWR | |
| 1000 W @ ∞:1 VSWR | |
| Load Impedance | Unlimited (50 ohm nominal) |
| Spurious Output | < -40 dBc (into 50 ohm load) |
| Harmonic Distortion | < -45 dBc (max power, 50 ohm load) |
| Communication Interfaces | RS-232C, POD, External Interlock |
| Cooling | Forced Air + Water Cooling |
| Water Flow (Min) | 2 GAL/min (7.6 L/min) |
| Water Pressure (Max) | 60 PSI (414 kPa) |
| Water Temp (Max) | 35 °C |
| Weight | 25.9 kg (57 lbs) |
| Software Version | 1.1.0 |
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