Home 590SPD2706AA 1 PCS used LAM Controller 853-A41869-001 Rev.C #LYQ007
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1 PCS used LAM Controller 853-A41869-001 Rev.C #LYQ007

Regular price $3,627.00 Sale price $2,000.00
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1 PCS used LAM Controller 853-A41869-001 Rev.C #LYQ007
1 PCS used LAM Controller 853-A41869-001 Rev.C #LYQ007
Regular price $3,627.00 Sale price$2,000.00
1 PCS used LAM Controller 853-A41869-001 Rev.C #LYQ007

1 PCS used LAM Controller 853-A41869-001 Rev.C #LYQ007

$2,000.00
Parameter Value
Part Number 853-A41869-001
Revision Rev. C
Manufacturer Lam Research Corporation
Product Type Precision Controller Module
Application Semiconductor Process Equipment (Etch / Deposition)
Parameter Min Typ Max Unit
Supply Voltage 22.8 24.0 25.2 V DC
Supply Current — 1.2 1.8 A
Power Consumption — 28.8 45.4 W
Logic Level — 3.3 / 5.0 — V DC
Isolation Voltage — 1500 — V AC
Parameter Min Typ Max Unit
Control Accuracy — ±0.01 ±0.05 % F.S.
Response Time — 1.2 2.5 ms
Update Rate 100 500 1000 Hz
Temperature Stability — ±0.005 ±0.01 % / °C
MTBF — 75,000 — hours

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