1 PCS used CKD VEC-SHA9-X0315 Vacuum Pressure Controller #LYQ007
Item
Parameter
Model
VEC-SHA9-X0315
Type
Integrated Vacuum Pressure Control System (for Semiconductor CVD)
Control Pressure Range
0.1 Pa ~ 133 Pa (0.00075 ~ 1 Torr)
Control Accuracy
± 0.1% FS
Supply Voltage
DC 24 V ± 10%
Power Consumption
Max. 150 VA
Operating Ambient Temperature
10 ~ 40 °C (No Condensation)
Operating Ambient Humidity
25 ~ 85% RH (No Condensation)
Weight
Approx. 3.8 kg
Protection Level
IP40
Item
Parameter
Linearity
± 0.2% FS
Hysteresis
≤ 0.1% FS
Repeatability
≤ ± 0.05% FS
Response Time
≤ 200 ms
Pressure Resolution
0.01 Pa
Control Method
Digital PID Feedback Control
Sensor Type
High-precision Piezoresistive Vacuum Sensor
Item
Parameter
Process Connection
NW-25 (KF-25) Flange
Control Input Signal
Analog: 0 ~ 5 VDC / 4 ~ 20 mA
Digital: RS-485 (Modbus RTU)
Output Signal
Control Signal for Integrated Valve Drive
Air Supply Pressure
0.4 ~ 0.6 MPa (Clean Dry Air)
Exhaust Port
NW-16 (KF-16) Flange
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