1 PCS used MKS VODMC-33650 Vapor On Demand Module #LYQ007
1 PCS used MKS VODMC-33650 Vapor On Demand Module #LYQ007
| Parameter | Specification |
|---|---|
| Full Scale Flow Range | 3000 sccm Water Vapor |
| Control Range | 10–100% of Full Scale |
| Accuracy | ±3% of Full Scale |
| Repeatability | ±0.2% of Full Scale |
| Resolution | 0.1% of Full Scale |
| Internal Operating Temperature | 125 °C – 140 °C |
| Ambient Temperature Range | 15 °C – 45 °C |
| Settling Time | ≤2 seconds (to within 2% of set point, SEMI E17-91) |
| Input Power | 3.5 A @ 110 VAC; 90–130 / 200–250 VAC, 1Ø |
| Water Supply Pressure | 20–40 psig |
| Leak Integrity (External) | <1 × 10⁻⁹ scc/sec He |
| Leak Integrity (Valve Internal) | <1 × 10⁻³ scc/sec He |
| Input Signals | Flow Set Point: 0–5 VDC; Valve Overrides (TTL); Auto Balance (TTL) |
| Output Signals | Flow Output: 0–5 VDC; At Temperature (TTL) |
| Electrical Connectors | DC: 15-pin Type “D” (RFI/EMI shielded); AC: IEC fused input |
| Process Connections | Inlet: 4 VCR® male; Outlet: 8 VCR® male |
| Mounting Orientation | Horizontal (base), Vertical (flow up) |
| Weight | 31 lbs |
| Wetted Materials | 316L SS VAR, 316 SS, Elgiloy®, Nickel, Perfluoroelastomers |
| Compliance | CE |
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