1 PCS used Lam Research 660-300316R007 RF Power Controller #LYQ007
1 PCS used Lam Research 660-300316R007 RF Power Controller #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 660-300316R007 |
| Manufacturer | Lam Research Corp. |
| Product Type | RF Power Controller Module |
| Input Voltage | 200-240 VAC, 3-Phase, 50/60 Hz |
| RF Frequency Range | 400 kHz – 60 MHz |
| Power Output Rating | Up to 5 kW (Pulse) / 1 kW (Continuous) |
| Control Interface | Digital (RS-232 / Ethernet) + Analog (0-10 VDC) |
| Impedance Matching | Auto-tuning, 50 Ω load compatible |
| Protection Features | Over-voltage, Over-current, VSWR, Over-temperature |
| Operating Temp | 0°C to +50°C |
| Cooling | Forced Air (Internal Fan) |
| Dimensions (W×H×D) | 19" Rack Mount (3U) × 420 × 380 mm |
| Weight | Approx. 12.5 kg |
| Certifications | CE, SEMI S2, RoHS Compliant |
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