Home 1 PCS used MKS OPTIMA RPDG-200Z-16031 (RPG-100Z Series) Pulsed DC Plasma Generator #LYQ007

1 PCS used MKS OPTIMA RPDG-200Z-16031 (RPG-100Z Series) Pulsed DC Plasma Generator #LYQ007

Sale price $3,000.00
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1 PCS used MKS OPTIMA RPDG-200Z-16031 (RPG-100Z Series) Pulsed DC Plasma Generator #LYQ007

1 PCS used MKS OPTIMA RPDG-200Z-16031 (RPG-100Z Series) Pulsed DC Plasma Generator #LYQ007

$3,000.00
Parameter Details
Model RPDG-200Z-16031 (OPTIMA RPG-100Z Series)
Type Asymmetric Bipolar Pulsed DC Plasma Generator
Rated Output Power 20,000 Watts (20kW)
Frequency Range Programmable: 50 – 250 kHz (Factory set)
Duty Cycle (Reverse Bias) Programmable: 0 – 40%
Applications Reactive PVD, CVD Bias, Hard Coating (Al₂O₃, BST, PZT, Ta₂O₅, TaN, TiN, ITO, SiO₂, ZnO, SiN)
Parameter Specification
Power Limit 21 kW (at 20kW rated output; proportional at lower power)
Current Limit 42 Amps
Regulation Modes Volts, Amps, Watts
Output Control Modes Ramping, Run Time, Joule, Sequence, Constant Run
DC Linearity / Accuracy ±0.1% of reading (10 – 100% load)
Ripple & Noise < 1% of full scale (typical)
Voltage Range Up to 1000V (DC + Pulse component)
Response Time < 100 µs (typical)
Parameter Specification
AC Input 3-phase, 180 – 230V / 360 – 440V, 48 – 62 Hz
Input Current (Max) 35A / 55A (208V); 19A / 25A (400V)
Input Power (Max) 40 kW
Power Factor > 0.95 (typical)
Efficiency > 85% (typical at full load)

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