1 PCS used LEYBOLD COMBIVAC CM31 Vacuum Controller #LYQ007
Parameter
Details
Model
COMBIVAC CM31
Catalog No.
157 89, 896 89, 897 89
Measurement Principle
THERMOVAC (Pirani) + PENNINGVAC (cold cathode)
Measurement Range
1×10⁻⁹ mbar to 1×10³ mbar; 1×10⁻⁹ Torr to 760 Torr
Measurement Channels
2×THERMOVAC channels; 1×PENNINGVAC channel
Compatible Sensors
THERMOVAC: TR 201, TR 205, TR 206, TR 211, TR 216
PENNINGVAC: PR 25, PR 32, PR 35, PR 36
Display
7‑segment LCD (digital)
Selectable Units
mbar, Torr, Pa, Micron
Gas Types
Air / N₂, Ar (selectable)
Sensor Cable Length
Max. 100 m; auto‑alignment for TR 211/TR 216
Relay Reaction Time
Approx. 30 ms (pressure change >1 decade)
Pressure Range
Uncertainty
10⁻³ to 10⁻² mbar/Torr
±20% of measured value
10⁻² to 10² mbar/Torr
±15% of measured value
Item
Specification
Power Supply
100–240 V AC, 50/60 Hz (universal)Leybold
Communication
RS‑232 C (built‑in)
Analog Output
Chart recorder outputs (per channel)
Switching
2 trigger relays per channel
Compliance
CE, RoHSLeybold
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