1 PCS used Lam Research 853-064940R206 (ESC Filter Power Board) #LYQ007
Parameter
Details
Manufacturer
Lam Research (OEM)
Part Number
853-064940R206 (also marked 853-064940-206)
Assembly Type
ESC Filter / Power Supply Board
Cross References
810-107813-206, 810-064624
Equipment Family
Lam Semiconductor Etch Systems (e.g., 2300 Series)
Parameter
Specification
Board Dimensions
Standard SEMI rack-mountable
PCB Material
FR-4, high-temperature laminate
Operating Temp
0°C to +50°C
Storage Temp
-40°C to +85°C
Humidity
5–95% RH, non-condensing
Cooling
Conduction / forced air
Parameter
Value
Input Voltage
24 VDC nominal (18–36 VDC)
Input Current
≤ 5 A (full load)
Isolation
1500 VDC (input–output)
EMI/EMC
Complies with SEMI E30, FCC Part 15 Class B
Protection
Over-voltage, over-current, reverse polarity
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