1 PCS used AMAT 0090-03151 Vacuum Sensor #LYQ007
1 PCS used AMAT 0090-03151 Vacuum Sensor #LYQ007
| Parameter | Details |
|---|---|
| Part Number | 0090-03151 |
| Manufacturer | Applied Materials (AMAT) |
| Sensor Type | Pirani Vacuum Gauge (Thermal Conductivity) |
| Measurement Range | 1.0 × 10⁻⁴ Torr to 760 Torr (Atmospheric) |
| Accuracy | ±1.5% of Reading (1.0 × 10⁻³ Torr to 760 Torr) |
| Response Time | < 100 ms (to 90% of full scale) |
| Output Signal | Analog: 0-10 V DC; Digital: RS-485 (Modbus RTU) |
| Supply Voltage | 24 V DC ± 10% |
| Power Consumption | < 5 W |
| Operating Temperature | 0°C to 50°C (32°F to 122°F) |
| Temperature Coefficient | ±0.05% / °C of Reading |
| Wetted Materials | 316L Stainless Steel, Alumina (Al₂O₃) |
| Flange Connection | ISO-KF16 (NW16) |
| Electrical Connector | Bayonet Locking 8-pin |
| Bakeout Temperature | Max. 80°C |
| Weight | Approx. 0.3 kg |
| Compliance | CE, SEMI S2 |
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