CE, SEMI F47, SEMI S2, UL 61010-1, CAN/CSA-61010-1MKS
Parameter
Value
Dimensions (W x D x H)
18.40 x 9.50 x 10.50 in (467 x 241 x 267 mm)
Weight
54 lb (24.5 kg)
Cooling
Water-cooled (100 PSIG MAX)
Parameter
Value
Max Gas Flow (NF₃)
Up to 8.0 slmMKS
Max Operating Pressure
Up to 10 Torr
Gas Dissociation Rate
> 95% (best-in-class)
Duty Cycle
2 sec min. to 100% (processing time >45 min)
Ignition Gas
100% Argon (Ar)MKS
Compatible Gases
O₂, NF₃, and O₂/NF₃ mixtures
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