1 PCS used Kyosan JFK125TP-TC2 RF power supply #LYQ007
1 PCS used Kyosan JFK125TP-TC2 RF power supply #LYQ007
| Parameter | Details |
|---|---|
| Brand | KYOSAN |
| Model | JFK125TP-TC2 |
| Part Number | 2L39-000121-23 |
| Oscillation Frequency | 3.2 MHz |
| Rated Output Power | 12.5 kW (CW) |
| Peak Output Power | 20 kW (PEAK) |
| Input Power | 200~208 V, 3-phase, 60 A, 50/60 Hz |
| Control Interface | Analog I/F, Debug, DeviceNet |
| Cooling Method | Water-cooled |
| Water Flow Requirement | 8 L/min |
| Weight | 45 kg |
| Applications | Semiconductor processes (Etching, CVD, PVD) |
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