1 PCS used LAM Research VIOP PHASE III Control Board 810-099175-013 REV B #LYQ007
1 PCS used LAM Research VIOP PHASE III Control Board 810-099175-013 REV B #LYQ007
| Parameter Category | Detailed Specifications |
|---|---|
| Basic Information | |
| Manufacturer | LAM Research (Lam Research Corporation) |
| Product Name | VIOP PHASE III Control Board |
| Part Number | 810-099175-013 |
| Revision | REV B |
| Associated Model | 714-000618-002 |
| Product Type | VME Bus Module/PCB Control Board |
| Country of Origin | United States |
| Physical Specifications | |
| Weight | Approx. 0.3 kg (0.66 lbs) |
| Board Structure | Multi-layer PCB, high-grade substrate material |
| Compliance | RoHS compliant |
| Environmental Specifications | |
| Operating Temperature | -40°C to +85°C (-40°F to 185°F) |
| Storage Temperature | -25°C to 100°C (-13°F to 212°F) |
| Humidity Tolerance | Up to 95% non-condensing |
| Functional Features | |
| Main Purpose | Versatile I/O processing and control for semiconductor manufacturing equipment |
| Application | Used in plasma etching, CVD, ALD and other advanced wafer fabrication processes |
| Interface Types | Multiple high-density connectors, compatible with VME bus standard |
| Communication Interfaces | Supports RS-232, RS-485, I²C, SPI and other industrial communication protocols |
| Data Transfer Rate | Up to 1 Mbps for serial communication |
| Core Components | |
| Main Control Chip | High-performance industrial microcontroller |
| Logic Chips | Multiple programmable logic devices for signal processing |
| Conversion Modules | Integrated A/D and D/A converters for analog signal processing |
| Memory | On-board flash/EEPROM for program and data storage |
| Quality & Reliability | |
| Condition | Original factory new/refurbished (available options) |
| Warranty | Standard 1-year warranty for new parts |
| MTBF | Designed for high reliability in 24/7 industrial environments |
| Compatibility | |
| Suitable Equipment | Lam Research 2300 Series Etchers, ALTUS Series Deposition Systems |
| Replacement | Direct replacement for VIOP Phase II and earlier revisions |
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