1 PCS used Lam Research Controller 853-341285-102 #LYQ007
1 PCS used Lam Research Controller 853-341285-102 #LYQ007
| Parameter | Value |
|---|---|
| OEM Part Number | 853-341285-102 |
| Product Type | Integrated System Controller Module |
| Application | Semiconductor Wafer Fabrication Equipment (Etch/Deposition Tools) |
| Input Voltage | 24 VDC ± 10% |
| Power Consumption | < 45 W (Typical) |
| Communication Interface | Ethernet (TCP/IP), RS-485, Modbus, Tool-Oriented Protocol |
| Control Channels | Multi-axis Motion Control, Digital I/O (16 In / 12 Out), Analog I/O (8 In / 4 Out) |
| Processor | 32-Bit High-Performance Embedded CPU |
| Memory | 512 MB Flash, 256 MB DDR SDRAM |
| Operating Temperature | 0°C to +55°C |
| Storage Temperature | -40°C to +85°C |
| Relative Humidity | 5% – 95% (Non-Condensing) |
| Dimensions (W x D x H) | 356 mm x 290 mm x 89 mm (19" Rack-Mountable) |
| Weight | 3.2 kg |
| Certifications | CE, SEMI S2, RoHS Compliant |
| Features | Real-Time Operating System (RTOS), Advanced PID Loop Control, Self-Diagnostic & Fault Monitoring, Field-Upgradable Firmware |
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