1 PCS used Agilent 10898D (10898-20104) Dual Laser Axis Board #LYQ007
1 PCS used Agilent 10898D (10898-20104) Dual Laser Axis Board #LYQ007
| Parameter | Details |
|---|---|
| Part Number | 10898D (Module: 10898-20104) |
| Product Description | High Resolution Dual Laser Axis Board (VME Bus) |
| Number of Axes | 2 axes per board |
| Form Factor | VME 6U-size board |
| Position Resolution | - 0.3 nm (with high-resolution optics)
|
| Measurement Range | ± 10.6 meters (linear) |
| Maximum Velocity | 2.2 m/s (linear interferometer, requires E1709A receiver) |
| Position Update Rate | 10 MHz |
| Data Output | 36-bit, 2's complement position word |
| Backplane Data Rate | > 100 kHz |
| Multi-board Synchronization | ± 2 ns |
| Variable Data Age | < 1 ns (typical) |
| Signal Filter | On-board programmable low-pass filter |
| Bus Compliance | VMEbus specification Revision C.1 |
| Electrical Interface | VME P2 connector (real-time hardware output) |
| Max. Boards per System | 7 |
| Key Applications | Semiconductor lithography, e-beam tools, high-precision positioning |
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