1 PCS used AE Advanced Energy Ovation 35162 (3150861-010) RF Generator #LYQ007
1 PCS used AE Advanced Energy Ovation 35162 (3150861-010) RF Generator #LYQ007
| Parameter | Value |
|---|---|
| Manufacturer | Advanced Energy (AE) |
| Model Number | Ovation 35162 |
| Part Number | 3150861-010 |
| Output Power | 3.5 kW (3500 Watts) |
| Output Frequency | 162 MHz (Very High Frequency, VHF) |
| Input Power | 3-phase, 208 VAC, 50/60 Hz, 35 A |
| Cooling Requirement | Water-cooled |
| Water Connectors | 3/8" NPT (45 ft-lbs torque) |
| Dimensions (W x D x H) | 19" x 29" x 8" (482.6 mm x 736.6 mm x 203.2 mm) |
| Weight | 154 lbs (69.85 kg) |
| Application | Semiconductor manufacturing (plasma processes) |
| Output Impedance | 50 ohms (standard RF) |
| Control Interface | Digital communication (RS-232/Ethernet) |
| Safety Standards | CE, SEMI S2 |
| Operating Environment | Cleanroom compatible |
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