1 PCS used MKS BARATRON 631A11MDEH Pressure Sensor #LYQ007
1 PCS used MKS BARATRON 631A11MDEH Pressure Sensor #LYQ007
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Parameter
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Specification
|
Unit
|
Notes
|
|
Product Name
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Pressure Sensor
|
-
|
Genuine MKS BARATRON Product
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|
Model Number
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631A11MDEH
|
-
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Original Factory Model, Standard Configuration
|
|
Brand
|
MKS BARATRON
|
-
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Industrial Precision Pressure Measurement Standard
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|
Product Type
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Capacitance Manometer Pressure Sensor
|
-
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High Stability, High Accuracy, Direct Measurement
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|
Application
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Vacuum Systems, Semiconductor Industry, Laboratory, Industrial Process Control
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-
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Suitable for Low to Medium Pressure Measurement Scenarios
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|
Parameter
|
Min
|
Typ
|
Max
|
Unit
|
Notes
|
|
Pressure Measurement Range
|
0
|
5
|
10
|
Torr
|
Absolute Pressure Measurement
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|
Measurement Accuracy
|
-
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±0.1
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±0.2
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%FS
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Factory Calibrated, Reference to 25℃ Ambient
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|
Repeatability
|
-
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±0.02
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±0.05
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%FS
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Stable Measurement Performance, Low Drift
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|
Response Time
|
-
|
10
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20
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ms
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Full Scale Step Response
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|
Zero Drift
|
-
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≤0.01
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≤0.03
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%FS/Year
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Long-Term Stability, Low Environmental Impact
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|
Parameter
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Min
|
Typ
|
Max
|
Unit
|
Notes
|
|
Medium Compatibility
|
-
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Inert Gas, Dry Air, Vacuum
|
-
|
-
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Avoid Corrosive & Condensable Mediums
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|
Working Temperature
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0
|
25
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50
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℃
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No Condensation, Stable Ambient
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|
Overpressure Capacity
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-
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2
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3
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×FS
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Short-Term Overpressure, No Permanent Damage
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Process Connection
|
-
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1/4" VCR
|
-
|
-
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Standard Industrial Connection, Leak-Proof
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|
Parameter
|
Min
|
Typ
|
Max
|
Unit
|
Notes
|
|
Power Supply Voltage
|
14
|
24
|
30
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VDC
|
Stable DC Power Input
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|
Power Consumption
|
-
|
0.5
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1.0
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W
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Normal Operating Condition
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|
Output Signal
|
-
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0-10
|
-
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VDC
|
Analog Output, Proportional to Pressure
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|
Output Impedance
|
-
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≤100
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-
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Ω
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Low Impedance, Stable Signal Transmission
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