1 PCS used DAIHEN FGA 30A2 2L39 000006-21 RF Power Supply#LYQ007
1 PCS used DAIHEN FGA 30A2 2L39 000006-21 RF Power Supply#LYQ007
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Item
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Official Specification
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Model Number
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FGA - 30A2 (2L39 - 000006-21)
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Product Name
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DAIHEN FGA - 30A2 RF Power Supply
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Brand & Manufacturer
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DAIHEN Corporation, Japan (Original Factory)
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Product Category
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3000W Radio Frequency Power Supply, Water - Cooled, Semiconductor Manufacturing Equipment
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Parameter
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Minimum
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Typical
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Maximum
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Unit
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Official Notes
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RF Output Power
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0
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3000
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3000
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W
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Continuous wave output, ±5% tolerance at rated load
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RF Operating Frequency
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13.553
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13.56
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13.567
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MHz
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ISM band, frequency stability ±0.005%/year
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Input Voltage (AC)
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200
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220
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240
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V
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Three - phase, 50/60Hz, total harmonic distortion ≤ 5%
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Input Current (Max)
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-
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17
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20
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A
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At 220V AC, full load operation
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Output VSWR
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1.0
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1.5
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2.0
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-
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Safe operation range; automatic power foldback beyond 2.0
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Control Interface
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-
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DeviceNet
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-
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-
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Compliant with ODVA standards, baud rate 125/250/500 kbps
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DC Auxiliary Voltage
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22
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24
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26
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V
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For control circuit, current capacity 2A
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