1 PCS used Lam Research RF Power Supply 853-064887-061 #LYQ007
1 PCS used Lam Research RF Power Supply 853-064887-061 #LYQ007
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Parameter
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Specification
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Unit
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Notes
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Product Name
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Lam Research RF Power Supply
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-
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Genuine Original Factory Part, 100% Authentic
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Product Model
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853-064887-061
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Lam Research Factory Standard Model, Non-Replacement
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Product Type
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High-Frequency RF Power Supply
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Solid-State Design, High Stability & Precision
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Origin
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USA, Lam Research Official Production Line
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Complies with US Industrial Precision & Safety Standards
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Application
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Semiconductor Etching, Thin Film Deposition, Wafer Processing
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Suitable for Lam Research Semiconductor Manufacturing Equipment
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Design Standard
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Lam Research Factory Standard, ISO 9001, IEC 61010-1
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Meets Semiconductor Industrial RF Power Control Requirements
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Supply Voltage
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200
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208/230
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240
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V AC
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3-Phase, 50/60 Hz, ±10% Fluctuation Tolerance
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Operating Current
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10
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12
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15
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A
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Rated Working Current, Full Load Condition
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RF Output Power
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900
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1000
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1100
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W
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Continuous Wave (CW) Output, Stable Power Delivery
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RF Operating Frequency
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13.558
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13.56
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13.562
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MHz
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Industrial Standard RF Frequency, High Accuracy
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Frequency Stability
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-
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±0.001
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-
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%
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Temperature Compensated, Stable Frequency Output
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Output Voltage
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500
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600
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700
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V peak
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Matching Semiconductor Etching Process Requirements
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Power Regulation Accuracy
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-
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±0.5
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-
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%
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Closed-Loop Control, High Precision Power Adjustment
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Parameter
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Specification
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Unit
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Notes
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Control Mode
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Digital Closed-Loop Control, Local/Remote Control
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-
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Precision RF Power & Frequency Control
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Communication Interface
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RS-485 (Modbus RTU), Ethernet (1Gbps), USB 3.0
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Remote Monitoring, Control & Data Transmission
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Input/Output Channels
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6×Digital Input, 4×Digital Output, 2×Analog Input
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-
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Process Signal Control & Fault Detection
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Response Time
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-
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≤3
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ms
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Fast Response for Real-Time Process Control
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Display Screen
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320×240 Pixels LED Backlit LCD
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-
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Display Power, Frequency, Voltage & Fault Information
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Protection Function
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Overpower, Overvoltage, Overcurrent, Overheating, Short Circuit
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-
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Automatic Shutdown & Alarm, Protect Equipment & Process
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1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world.
3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please contact us to provide you with accurate quotation and real pictures.
4. If you can not find the product you need in our store, please contact us .we will check it for you.