1 PCS new MKS HPS Vacuum Angle Valve ULV-2STG-MF80-LPV125-L 99F0077 #LYQ007
1 PCS new MKS HPS Vacuum Angle Valve ULV-2STG-MF80-LPV125-L 99F0077 #LYQ007
| Parameter | Specification |
|---|---|
| Product Type | Two-Stage Ultra High Vacuum (UHV) Angle Isolation Valve |
| Part Number | 99F0077 |
| Port / Flange Size | MF80 (ISO-K 80 / NW80) |
| Body Material | 304 Stainless Steel (TIG welded) |
| Bellows | Formed 321 Stainless Steel |
| Seal Type | Viton® (FKM) |
| Vacuum Range | Atmosphere to 1.0 × 10⁻⁹ Torr |
| Helium Leak Rate | ≤ 1.0 × 10⁻⁹ std cc/sec |
| Max Bakeout Temp | 150 °C (Body) |
| Actuation | Pneumatic (Normally Closed) |
| Pneumatic Supply | 65 psig (4.5 bar) |
| Opening / Closing Time | ~100 msec |
| Blow-By Pressure | 45 psia |
| Cylinder Volume | 27.6 cm³ (1.69 in³) |
| Weight | Approx. 6.6 lb (3.0 kg) |
| Features | Two-stage soft-pumpdown; Integrated bypass (0.225" orifice); Limit switch; Pneumatic solenoid |
| Application | High & Ultra High Vacuum systems (Semiconductor, Optical processing) |
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
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