1 PCS used AMAT E15004820 Ion Implant Control Board #LYQ007
1 PCS used AMAT E15004820 Ion Implant Control Board #LYQ007
| Parameter | Value / Description |
|---|---|
| Part Number | E15004820 |
| Product Type | Ion Implantation Beam & Process Control Board |
| Compatible Systems | Quantum III, VIISta Trident, 9500xR Series Ion Implanters |
| Function | Closed-loop control of beam energy, dose, angle, scan & uniformity |
| Control Core | Embedded real-time processor, 16MB SDRAM / 32MB Flash |
| Input Voltage | 24 VDC (nominal), redundant 24V backup |
| Power Consumption | Max 8.5 W (non-redundant) |
| I/O Interface | Multi-channel analog & digital I/O; isolated signal conditioning |
| Communication | RS-485, high-speed parallel backplane, devicenet compatible |
| Isolation | Optocoupler isolation, ESD & surge protection |
| Operating Temp | 0°C to +60°C (32°F to 140°F) |
| Dimensions | Approx. 147 × 51.5 × 114 mm (standard VME/PCB form factor) |
| Weight | Approx. 0.6 kg |
| Safety Features | Over-voltage, over-current, over-temperature protection |
| Diagnostics | Built-in self-test (BIST), fault logging, interlock logic |
| Accuracy | Energy stability < ±0.5%, dose repeatability < ±1% |
| Certifications | CE, SEMI S2, RoHS compliant (industrial grade) |
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