1 PCS used LAM Research 853-495649-002 ESC Power Supply Module#LYQ007
1 PCS used LAM Research 853-495649-002 ESC Power Supply Module#LYQ007
| Parameter | Value |
|---|---|
| Part Number | 853-495649-002 |
| OEM Description | ESC, MONO, PS, P/M 853 (Electrostatic Chuck, Monopolar, Power Supply, Panel Mount) |
| Applicable Equipment | LAM O2P1 (Oxide Etcher) |
| Model/Revision | REV: D, 12181900 |
| Serial Number Range | MSPR0025182 |
| Type | Monopolar Electrostatic Chuck (ESC) Power Supply |
| Mounting | Panel Mount |
| Condition | OEM / New |
| Material Code | PS-9900-00 |
| Function | Provides high-voltage DC bias for wafer clamping via electrostatic chuck |
| Interface | J2 Connector (Control/Signal Interface) |
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