1 PCS used MKS 152H-14614 Automatic Pressure Controller #LYQ007
1 PCS used MKS 152H-14614 Automatic Pressure Controller #LYQ007
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Parameter
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Specification
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Unit
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Notes
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Brand
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MKS Instruments
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-
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Genuine, Original Factory Production[1]
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Model No.
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152H-14614
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-
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Original Model, Factory Calibrated, Automatic Control Type
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Product
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Automatic Pressure Controller
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-
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Industrial Grade, High-Precision Pressure Regulation[2][5]
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Application
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Semiconductor Fab
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-
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MKS Semiconductor Equipment Pressure Control[3][6], adapted to clean lab environment[7]
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Origin
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USA Factory
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-
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MKS Official Production Line, Strict Quality Control
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Control Range
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0.01
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5
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10
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Bar
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Automatic Regulation, 15%~95% of Full Range[1][4]
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Control Accuracy
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±0.001
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±0.005
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±0.01
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Bar
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Full Scale, Calibrated, ≤±0.5% of Range[1][4]
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Response Time
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30
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60
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90
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