1 PCS used AMAT Heating Plate Model 0041-48310 REV 12 #LYQ007
1 PCS used AMAT Heating Plate Model 0041-48310 REV 12 #LYQ007
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Parameter
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Specification
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Unit
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Notes
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Product Name
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Heating Plate
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-
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Genuine AMAT Product, Industrial Grade High Temperature Resistance, for Semiconductor Manufacturing
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Model Number
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0041-48310 REV 12
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-
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Original Factory Model, Revision 12, Optimized for Advanced Semiconductor Processes
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Brand
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AMAT (Applied Materials)
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-
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Global Leader in Semiconductor Equipment, Professional Industrial Component Manufacturer
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Application
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Advanced Semiconductor Equipment, Precision Wafer Heating, Industrial High-Temp Control
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-
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Matching AMAT Semiconductor Production Lines, Compatible with Thin-Film Deposition Processes
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Revision
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REV 12
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-
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Factory Standard Revision, Enhanced Temperature Uniformity & Operational Stability
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Operating Temperature Range
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25
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250
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450
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℃
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Factory Calibrated, Precision Temperature Control for Semiconductor Processes
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Temperature Accuracy
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±0.3
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±0.8
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±1.2
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℃
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@ Full Temperature Range, Uniform Heating Surface, Suitable for Precision Wafer Processing
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Temperature Uniformity
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-
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±1.5
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±2.5
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℃
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Heating Surface Full Coverage, No Local Overheating, Protecting Wafer Integrity
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Heating Rate
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8
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12
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18
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℃/min
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Adjustable, Fast Heating, Stable Temperature Rise, Adapting to Semiconductor Production Rhythm
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Cooling Rate
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5
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7
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10
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℃/min
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Natural Cooling with Optional Forced Cooling, Ensuring Process Efficiency
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Operating Voltage
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110
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220
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240
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VAC
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50/60Hz, Factory Standard Voltage, Stable Power Supply
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Operating Current
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3
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6
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9
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A
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Depends on Operating Temperature, Stable Current Output
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Power Rating
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600
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1200
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1800
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W
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Stable Power Output, Energy-Saving Design, Matching High-Temp Requirements
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Insulation Resistance
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200
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500
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-
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MΩ
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@ 500VDC, High Insulation Safety, Meeting Industrial Standards
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