1 PCS used BROOKS Flow Meter GF100CXXC #LYQ007
1 PCS used BROOKS Flow Meter GF100CXXC #LYQ007
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Parameter
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Specification
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Unit
|
Notes
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Product Name
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Flow Meter
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-
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Genuine BROOKS Product
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Model Number
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GF100CXXC
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-
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Original Factory Model, GF100 Series
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Brand
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BROOKS
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-
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Industrial Precision Flow Measurement Brand
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Product Type
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Mass Flow Meter
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-
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Metal Sealed, High Purity, Stable Performance
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Application
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Semiconductor, MOCVD, High-Purity Gas Flow Measurement
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-
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High Precision Process Control Scenarios
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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|
Flow Range (Gas)
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0.1
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50
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300
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SLPM
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Standard Conditions: 25℃, 1atm; MultiFlo™ Compatible
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Flow Range (Liquid)
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-
|
-
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-
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-
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Gas-Only Measurement Model
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Accuracy
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-
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±0.3
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±0.5
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%
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Of Full Scale; High Purity Standard
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Repeatability
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-
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±0.1
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±0.2
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%
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Of Full Scale; Stable Long-Term Performance
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Response Time
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700
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850
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1000
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ms
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10-90% of Full Scale; Fast Response Design
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Long-Term Zero Stability
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-
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<±0.5
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-
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%FS/Year
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Low Drift, Reduced Calibration Frequency
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|
Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Power Supply Voltage
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12
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24
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30
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VDC
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Stable Input, Ripple ≤ 1%
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Power Consumption
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-
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3.0
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4.0
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W
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Normal Operating Condition
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Output Signal
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-
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4-20
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-
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mA
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Analog Output, 2-Wire; Optional Digital Output
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Communication Interface
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-
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RS485
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-
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-
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Modbus RTU Protocol; Optional DeviceNet™
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