1 PCS used Lam Research Semiconductor Controller 853-259817R101 #LYQ007
1 PCS used Lam Research Semiconductor Controller 853-259817R101 #LYQ007
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Parameter
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Specification
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Unit
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Notes
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Product Name
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Lam Research Semiconductor Controller
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-
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Genuine Lam Research Factory Part, 100% Authentic Semiconductor Control Unit
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Product Model
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853-259817R101
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-
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Lam Factory Standard Model, Non-Replacement, Factory-Calibrated
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Product Type
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Industrial Grade Semiconductor Equipment Controller
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-
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High Precision Control, Low Impedance, Zero Signal Attenuation, Stable Process Control
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Origin
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Lam Research Official Production Line
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-
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Strictly Complies with Lam Factory Precision & Safety Standards
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Application
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Lam Research Semiconductor Dry Etching Equipment, High-Power Semiconductor Process Control
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-
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Suitable for Lam High-Precision Semiconductor Manufacturing Process Control
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Design Standard
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Lam Research Factory Standard, ISO 9001, IEC 61010-1, IEC 60950-1
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-
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Meets Industrial Semiconductor Controller Performance & Safety Requirements
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Operating Voltage
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23.5
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24
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24.5
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V DC
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Stable Power Supply for Control Module & Core Components
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Max Working Current
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5
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6
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7
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A
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Rated Working Current, Full Load Condition (Including Control Circuit Operation)
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Static Power Consumption
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-
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1.3
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1.6
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W
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Standby Mode, Low Power Consumption, Energy-Saving Design
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Insulation Resistance
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≥200
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-
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-
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MΩ
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500V DC, High Insulation Performance, Protect Control Module Safety
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Dielectric Strength
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1000
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-
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1500
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V AC
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1 Minute, No Breakdown, No Arcing, Ensure Stable Control Operation
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Control Precision
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±0.08
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-
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-
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%
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High-Precision Control, Adapt to Semiconductor Process Requirements
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Signal Response Time
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≤8
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-
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-
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ms
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Fast Response, Reduce Signal Delay, Ensure Process Stability
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Electronic Thermal Overload Protection
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50
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80
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100
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%
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Simulates motor temperature rise, alarms before overload damage, suitable for single-drive-single-motor scenario
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Torque Limit
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70
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85
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100
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% of Rated Torque
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Adjustable drive/brake torque, prevents mechanical stress and tripping during jamming
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Parameter
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Specification
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Unit
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Notes
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PCB Layers
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8 Layers
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-
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High-Density Wiring, Reduce Signal Interference, Ensure Control Signal Transmission
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Copper Thickness
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2
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oz
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High Copper Thickness, Good Conductivity, Adapt to High-Power Requirements
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Board Thickness
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2.0
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mm
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High Mechanical Strength, Adapt to Industrial Equipment Vibration
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Interface Type
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RS-485, Ethernet, Analog Input/Output (0-10V/4-20mA), Digital I/O
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-
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Multi-Interface Design, Easy Connection with Semiconductor Equipment, supports signal calibration
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Connector Type
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Industrial Grade High-Precision Waterproof Connector
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-
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Anti-Vibration, Anti-Loose, Anti-Interference, Long Service Life
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