1 PCS used COMET RF Match (AMAT 0190-36837) #LYQ007
1 PCS used COMET RF Match (AMAT 0190-36837) #LYQ007
| Parameter | Value |
|---|---|
| Part Number | AMAT 0190-36837 |
| Manufacturer | COMET (for Applied Materials/AMAT) |
| Type | Automatic RF Match Network |
| Frequency | 13.56 MHz |
| RF Input Power | 3000 W (3 kW) |
| RF Voltage Rating | 3500 VRMS |
| Control Interface | Analog / Digital (Phase & Magnitude) |
| Input Power | 24 VDC |
| Impedance Range | 2 – 1000 Ω (50 Ω system) |
| Tuning Speed | < 500 ms |
| Cooling | Forced Air (dual fans) |
| Dimensions (W×H×D) | 19" rack, 3U × ~450 mm |
| Weight | ~15 kg |
| Applications | Semiconductor Etch / CVD Chambers |
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