1 PCS USED AMAT 0190-30303W / COMET 301685 RF Match #LYQ007
1 PCS USED AMAT 0190-30303W / COMET 301685 RF Match #LYQ007
| Parameter | Value |
|---|---|
| Manufacturer | COMET (for Applied Materials/AMAT) |
| AMAT Part Number | 0190-30303W |
| COMET Part Number | 301685 |
| Frequency Range | 13.56 MHz (fixed) |
| Max. RF Power | 3000 W (3 kW) |
| Max. RF Voltage | 3500 VRMS |
| Max. RF Current | 35 A |
| System Impedance | 50 Ω (nominal) |
| Input Power | 24 VDC, 3.5 A |
| Cooling | Forced Air (dual fans) |
| Weight | 7.7 kg |
| Match Type | Auto-Tuning RF Impedance Match Network |
| Control Interface | Analog & Digital I/O, RS-232/485 |
| Protection | Over-Voltage, Over-Current, Over-Temperature |
| Application | Semiconductor Etch/CVD Process Chambers |
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