1 PCS used COMET RF Matcher Lam 27-382473-00 #LYQ007
Parameter
Specification
Unit
Notes
Product Name
RF Impedance Matching Network
-
Automatic Matching System
Part Number
27-382473-00
-
Lam Research P/N
Model
20033653 Rev. 01
-
COMET Internal Model
Type
Automatic RF Match
-
Microprocessor Controlled
Input Power
50 – 150
W
CW (Continuous Wave)
Frequency Range
13.56 – 18
MHz
Standard Industrial Frequency
Input Impedance
48 – 52
Ω
Nominal 50 Ω
Cooling
Forced Air
-
Internal Fan
Operating Voltage
200 – 240
VAC
Single Phase
Parameter
Min
Typ
Max
Unit
Reflected Power
—
<1
5
% of Input
Matching Time
—
300
1000
ms
Tuning Resolution
—
0.1
—
Step
VSWR (Input)
—
<1.1:1
1.5:1
—
Isolation
—
60
—
dB
Control Interface
RS-232 / Analog
—
—
—
Parameter
Specification
Unit
Dimensions (W×H×D)
432 × 133 × 508
mm
Weight
22
kg
Operating Temp
0 – +40
°C
Storage Temp
-20 – +70
°C
Humidity
10 – 90
% RH (non-condensing)
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