1 PCS used LAM Controller 853-801876-014 Rev:A #LYQ007
Parameter
Value
Part Number
853-801876-014
Revision
A
Vendor Code
1023220
Product Name
Controller Module / LONWORKS Node
Application
Semiconductor Processing Equipment
Weight
0.65 kg
Country of Origin
United States
Parameter
Value
Form Factor
Metal Enclosed Module
Connectors
- Dual D-Sub (DB-50) I/O Connectors
- RS-232 Serial Port
- Ethernet Port
Mounting
Panel / Chassis Mountable
Parameter
Value
Communication Protocol
LONWORKS, RS-232
Network Interface
Ethernet (TCP/IP)
I/O Configuration
Analog/Digital I/O (ADIO) Module
Control Capability
Supports up to (4) Process Chambers
System Compatibility
LAM Etch, Deposition, CVD Systems
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