1 PCS used MKS AX7690NOV-01 Remote Plasma Source (RPS) #LYQ007
1 PCS used MKS AX7690NOV-01 Remote Plasma Source (RPS) #LYQ007
| Parameter | Value |
|---|---|
| Model | AX7690NOV-01 (R*evolution® Series) |
| Plasma Power | Up to 6 kW |
| RF Frequency | 13.56 MHz (Typical for R*evolution Series) |
| Process Gas | O₂, Ar, O₂/N₂ (9:1), etc. |
| Max Gas Flow | Up to 6 slm |
| Operating Pressure | Ignition: 0.5–2.0 Torr; Process: 0.5–2.0 Torr |
| Input Power | 208 VAC, 3‑phase, 50/60 Hz, 30 AMKS |
| Cooling | Water: 1.75 gpm, <30°CMKS |
| Dimensions | 15.7 × 13.7 × 12.14 in (399 × 348 × 308 mm) |
| Weight | 29.7 kg |
| Control Interface | Discrete I/O, RS‑232, Ethernet |
| Compliance | CE, SEMI S2, SEMI F47 |
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