1 PCS used NMUEGGE MA3000C-073BB Remote Plasma Source (RPS)#LYQ007
1 PCS used NMUEGGE MA3000C-073BB Remote Plasma Source (RPS)#LYQ007
| Parameter | Details |
|---|---|
| Model | MA3000C-073BB |
| Type | Radical / Remote Plasma Source (RPS) |
| Process Applications | Etching, Deposition, Photoresist Stripping, Chamber Cleaning |
| Output Power (CW) | 3000 W |
| Frequency | 2450 MHz (ISM Band) |
| Mains Voltage | 208 / 230 V, 1~ (L/N/PE), 50/60 Hz |
| Dielectric Material | High-purity Ceramic (Sapphire option available) |
| Cooling | Water-cooled plasma applicator |
| Gas Compatibility | Fluorine-based (e.g., NF3, SF6) & Fluorine-free (e.g., O2, H2) chemistries |
| Ignition | No ignition gas (Argon) requiredmuegge-group.com |
| Interface | ISO-K63 flange |
| Design | Patented R3T design |
| Features | Integrated magnetron head, isolator, high plasma density, damage-free (no ion bombardment) |
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