1 PCS used MKS DELTA II Flow Ratio Controller DLT2A1-29612 #LYQ007
Parameter
Value
Product Model
DELTA II (DLT2A1 Series)
Part Number
DLT2A1-29612
Flow Range
500 SCCM (Nitrogen, N2 equivalent)
Control Type
2-zone (2-channel) Flow Ratio Controller
Communication
DeviceNet
Fitting Type
Swagelok® 4 VCR® (1/4"): Inlet female (rotatable), Outlets male (non-rotatable)
Weight
5 lbs (2.3 kg)
Certifications
CE Marked
Parameter
Value
Input Flow Range
5 to 100% of each channel Full Scale (FS) rating
Ratio Control Range
1:1 to 20:1 and 20:1 to 1:1
Ratio Accuracy
±2% of ratio set point
Ratio Repeatability & Reproducibility
±0.3% of ratio set point
Resolution
0.02% of channel Full Scale
Ratio Settling Time
< 2 seconds
Warm-up Time
< 30 minutes
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