Home 1 PCS used Mykrolis RGEN02/02 Driver Board #LYQ007

1 PCS used Mykrolis RGEN02/02 Driver Board #LYQ007

Sale price $1,500.00
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1 PCS used Mykrolis RGEN02/02 Driver Board #LYQ007

1 PCS used Mykrolis RGEN02/02 Driver Board #LYQ007

$1,500.00
Parameter Details
Part Number RGEN02/02
Product Type Photoresist Dispense Manifold Pump Driver PCB
Compatible System Mykrolis RGEN-02 Series Photoresist Pump
Manufacturer Mykrolis Corporation (now Entegris)
Origin Japan
Application Semiconductor wafer fabrication, photoresist handling
Parameter Specification
Supply Voltage (Vcc) +24 V DC ±5%
Input Current (Typical) 1.2 A @ 24 V DC
Input Current (Max) 2.5 A @ 24 V DC (Peak)
Logic Voltage +5 V DC (Internal, 100 mA max)
Isolation Voltage 1500 V AC (Input/Output)
Power Dissipation < 30 W (Continuous)
Interface Type Rating/Details
Digital Inputs (DI) Opto-isolated, 8 channels 5–24 V DC, 10 mA, Active LOW
Digital Outputs (DO) Open-collector, 4 channels 24 V DC, 500 mA max, sink current
Analog Input (AI) 1 channel (0–10 V) 12-bit resolution, ±0.1% F.S.
Analog Output (AO) 1 channel (0–10 V / 4–20 mA) 12-bit resolution, ±0.1% F.S.
Communication RS-485 (Half-duplex) 9600 bps, 8N1 protocol
Motor Control Stepper motor driver 2-phase, 1.8°/step, 3.0 A/phase

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