1 PCS used HFA-50A Daihen Power supply RF and plasma generator #LYQ007
1 PCS used HFA-50A Daihen Power supply RF and plasma generator #LYQ007
| Parameter Category | Parameter | Value | Unit | Remarks |
|---|---|---|---|---|
| General Identification | Model | HFA-50A | - | RF Match Unit for Plasma System |
| Compatibility | AGA-50 Series | - | For Daihen AGA-50B2-V | |
| Electrical Ratings | Output Power | 5000 | W | |
| Operating Frequency | 60 | MHz | ||
| Input Voltage | 3Ø, 208 | VAC | ||
| Input Current | 55 | A | ||
| Frequency | 50/60 | Hz | ||
| Performance Specs | Matching Accuracy | ≤ 1 | % (Power Ratio) | |
| Matching Speed | ≤ 3 | s | ||
| Output Stability | ±1 or ±3, Whichever is larger | - | ||
| Physical & Environmental | Width (W) | 420 | mm | |
| Depth (L) | 500 | mm | ||
| Height (H) | 222 | mm (5U) | ||
| Cooling Method | Water-Cooled | - | ||
| Certifications & Approvals | Approvals | OEM Standard | - |
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