1 PCS used COMET RF Match (AMAT 0190-38622) #LYQ007
1 PCS used COMET RF Match (AMAT 0190-38622) #LYQ007
| Parameter | Specification | Unit |
|---|---|---|
| Part Number | 0190-38622 | - |
| Manufacturer | COMET (for AMAT / Applied Materials) | - |
| Frequency | 13.56 | MHz |
| Power Rating | 2000 (2.0 kW) | W (CW) |
| RF Voltage (Max) | 3500 | VRMS |
| Impedance Matching Range | Typical: 5 – 200 Ω (real), ±200 jΩ (imaginary) | Ω |
| VSWR (Match State) | ≤ 1.2:1 | - |
| Reflected Power | ≤ 1 % of forward | % |
| Control Interface | Digital (RS-232 / RS-485 compatible) | - |
| Input Power | 100 – 240 | VAC (1φ, 50/60 Hz) |
| Cooling | Forced Air (Internal Fan) | - |
| Dimensions (Approx) | Standard 19" Rack-mount | mm |
| Weight (Approx) | ~ 6.8 | kg |
| Application | Semiconductor Plasma Processes (Etch / Deposition) | - |
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